
2 inch AlN Templates
Specifications:
Item | AlN-T-C-C50 |
Dimensions | Ф 50.8 mm ± 0.1 mm |
Substrate | Sapphire (Single Side Polished)m |
Thickness | 4 ~ 5 µm |
Orientation | C-plane (0001) ± 1° |
Conduction Type | Semi-Insulating |
Crystalline quality | XRD FWHM of (0002) < 350 arcsec. XRD FWHM of (10-12) < 450 arcsec |
Edge Exclusion zone | < 2 mm |
Surface Roughness | Ra < 5 nm (10 µm x 10 µm) |
Package | Packaged in a class 100 clean room environment, in cassettes of 25pcs or single wafer containers, under a nitrogen atmosphere. |
* Other thickness, size can be customized
